Surface Adhesion Control of Patterned Perfluoro Polymer for Release Technology in the μTAS Fabrication Process

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概要

• 論文の詳細を見る

• This paper describes the formation of fluidic channels by surface adhesion control of the patterned perfluoro polymer layer. We proposed release technology using the poor adhesive region formed by the patterned perfluoro polymer layer. Proposed method releases layered films so as to form a space for a channel. It is possible to close the channel completely because the layered films are contacted together in the initial state. This feature allows leakless micro diaphragm valves and thinner balloon devices. On the other hand, the patterning process of the perfluoro polymer layer without the increase of adhesiveness is necessary in order to realize proposed release technology, because the surface propeties of the perfluoro polymer are sensitive to the conditions of patterning process. Our group obtained successful results of the proposed release technology by the use of copper as a dry eching mask with post-annealing at temperatures higher than the glass transition temperature.

• 社団法人 電気学会の論文
• 2009-07-01

著者

• KONISHI Satoshi

  Department Micro System Technology, Faculty of Science and Engineering, Ritsumeikan University

• Kobayashi Taizo

  Research Organization Of Science And Engineering Ritsumeikan University

• Konishi Satoshi

  Department Of Micro System Technology Ritsumeikan University

• Konishi Satoshi

  Department Micro System Technology Faculty Of Science And Engineering Ritsumeikan University

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