The Impact of Nitrogen Implantation at LDD(NIL) on Deep Sub-Micron CMOS Devices
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概要
- 論文の詳細を見る
- 1999-09-20
著者
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Kang Dae-gwan
R&d Division Lg Semicon Co. Ltd.
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Lee S‐g
Korea Univ. Chungnam Kor
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Lee Sang-gi
R&d Division Hyundai Microelectronics Co.
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Hong Sung-kwon
R&d Division Hyundai Microelectronics Co.
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Ahn Jae-gyung
R&d Division Hyundai Microelectronics Co.
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Ahn Jae-gyung
Advanced Technology Department Ulsi Laboratory Lg Semicon Co. Ltd.
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Hwang Jeong-mo
R&d Division Hyundai Microelectronics Co.
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HONG Sung-Kwon
LG Semicon Co., Ltd, R&D Division
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LEE Sang-Gi
LG Semicon Co., Ltd, R&D Division
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AHN Jae-Gyung
LG Semicon Co., Ltd, R&D Division
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KANG Dae-Gwan
LG Semicon Co., Ltd, R&D Division
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HWANG Jeong-Mo
LG Semicon Co., Ltd, R&D Division
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Hwang Jeong-mo
Advan. Tech. Lab. Lg Semicon Co. Ltd.
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Hwang J.-m.
Hyundai Electronics Industries Co.ltd. Memory R&d Division
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