パーフルオロ化合物プラズマ下流における気相分子成長 : 観測・反応・成膜

概要

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The growth of gaseous neutral species and positive ions has been investigated in the downstream region of perfluorocompounds plasmas by mass spectrometry. As a result, there were several series of CnF2n+1+, CnF2n-1+ and CnF2n-3+ for the positive ions and CnF2n+2 and CnF2n for the neutral species up to 400 amu in the Ar/CF4 plasmas. The logarithmic plots of the CnF2n+1+ intensity at n≥2 and the CnF2n-1+ intensity at n≥3 with respect to the mass number in the CF4 case were decreased linearly with increase of the mass number. Such property in the plots can be explained by considering the rate equations for the addition reactions of CF2 to CnF2n+1+ at n≥2 and CnF2n-1+ at n≥3 under the steady-state approximation. Nano-particle formation using the macromolecules growing in the downstream region of the Ar/c-C4F8 plasma was confirmed through X-ray photoelectron spectroscopy and atomic force microscopy.
日本真空協会の論文
2006-03-20