New Nondestructive Carrier Profiling for Ion Implanted Si Using Infrared Spectroscopic Ellipsometry

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概要

• 論文の詳細を見る
• 1997-09-16

著者

• Sakamoto Takuya

  Department Of Communications And Computer Engineering Graduate School Of Informatics Kyoto Universit

• TANIGUCHI Kenji

  Department of Cancer Research, Fuji Gotemba Research Laboratories, Chugai and Pharmaceutical Co

• Kamakura Yoshinari

  Department Of Electronics And Information Systems Osaka University

• Kamakura Yoshinari

  Department Of Electronic Information And Energy Engineering Graduate School Of Eng. Osaka University

• Nakano Hiroyuki

  Department of Public Health, Nagasaki University School of Medicine

• NISHI Kenji

  STARC

• NAGANO Hiroto

  STARC

• Sakamoto Takuya

  Department Of Communications And Computer Engineering Graduate School Of Informatics

• Nakano Hiroyuki

  Department Of Public Health Nagasaki University School Of Medicine

• Sakamoto Takuya

  Department Of Biotechnology Graduate School Of Agricultural And Life Sciences The University Of Toky

• Sakamoto Takuya

  Department Of Electronics And Information Systems Osaka University

• Taniguchi Kenji

  Department Of Biotechnology Tottori University

• Nakano Hiroyuki

  Department Of Earth And Space Science Graduate School Of Science Osaka University

• Nakano Hiroyuki

  Department Of Electronics And Information Systems Osaka University

• Taniguchi Kenji

  Department of Electronics and Information Systems, Osaka University

• Kamakura Yoshinari

  Department of Electronic Engineering, Osaka University, Suita, Osaka 565-0871, Japan

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