スリット形状LED光源による干渉縞検出方式リニアエンコーダの開発

概要

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This paper deals with the interference fringe-type linear encoder using a point source LED with a slit, able to achieve high resolution, a range temperature range, and high reliability. In order to realize the linear encoder, it is designed by using a simulator of the Fresnel-Kirchhoff diffraction formula. The sensor head of the linear encoder is adapted the light emit-detection device which uses a combination of a LED which has a slit on the luminous surface and a photo detector. The low cost diffraction scale is archived the processing expense by combining a single etching process with a double thin-film process without involving glass etching. This linear encoder achieved a lower than 10nm resolution.
社団法人精密工学会の論文
2005-07-05