金属・半導体クラスター利用による高次ナノ構造材料創製

概要

論文の詳細を見る
Recently we have sucessfully developed, 1) the apparatus to select a size of clusters, which is generated by laser ablation and innert gas aggregation techniques, by a TOF mass spectrometer with an ion reflector and a mass gate, 2) the machine to generate mass selected cluster flux with high density by CORDIS (Cold Reflex Discharge Ion Source), gas filled multi cooling stages consisted of Q-pole, and mass selection filters by means of Q-mass spectrometer, and 3) the apparatus to generate highly densed ionized cluster flux by Ar discharged magnetron sputtering gun operated under about 1,000 Pa He as an aggregation gas, to study deposition of cluster flux with and/or without a kinetic energy onto substrate for a fabrication of a complex quantum confined nano structure on any substrate by using clusters as building blocks.In this paper, the main characteristics of above three apparatuses and some of the recent preliminary experimental results are summarized. And the prospects of this new attempt are discussed after reviewing the latest progresses of computer simulation on “soft landing” and “hard collision” by cluster impacts onto a crystal substrate by our colaborative laboratory.
日本質量分析学会の論文
1997-04-01