高密度3次元実装技術を用いたマイクロカメラ視覚システム

概要

論文の詳細を見る
A CCD micro-camera visual inspection system which consists of an experimental wireless micromachine for inspection of inner surface of 10 mmφ tubes in electric power generators has been developed based on a high-density 3D packaging technology. The CCD imaging data transmission circuit has been packaged at high-density by developing a 3D sidewall interconnection technology which has sidewall footprints realized by high-aspect-ratio Cu wiring layers. The viewpoint changing mechanism for inspection of inner surface of tube was realized by 3D motion reflective mirror which incorporates 2 axial electrostatic wobble motors. The prototyped CCD micro-camera visual inspection system, which includes CCD imaging data transmission circuit and the viewpoint changing mechanism, operates satisfactorily and it has been confirmed that the output CCD images have high resolution which enables 20 μm objects to be distinguished inside 10 mmφ tubes.
社団法人エレクトロニクス実装学会の論文
2003-03-01