誘導結合型高周波プラズマ支援マグネトロンスパッタリング法による金属オキシカーバイドの合成
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概要
- 論文の詳細を見る
Metal oxycarbide thin films, such as chromium oxycarbide, molybdenum oxycarbide and tungsten oxycarbide films have been synthesized on SUS 304 stainless steel for hard coating at a temperature of 673 K with metal, carbon dioxide and methane by an inductively coupled radiofrequency plasma assisted magnetron sputtering method. The maximum micro-Vickers hardness of the films is more than 20 GPa. X-ray diffraction measurements reveal that the structure of the oxycarbide films is cubic and the lattice constant of them is 0.42-0.43 nm. The films showing a high micro-Vickers hardness are composed of [110] orientated crystallites.
- 日本真空協会の論文
- 2004-08-20