2段階溝型水晶振動子の製法

概要

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This paper will show the manufacturing result of AT-cut quartz resonators for high frequency applications. Applying a chemical etching process with quartz anisotropy property enabled us to develop novel single-sided grooved-type quartz resonators in a two-step shape. Taking the anisotropy of quartz into account, regardless of the quartz wafer thickness, we succeeded in making resonators of optimal structures whose aperture ratio was the diameter of the vibration part (d) over the thickness (t). This structure has the advantage of selecting the aperture ratio freely regardless of the anisotropy of the quartz.
2004-05-01