ネットワークアナライザによる水晶ブランク研磨機の制御

概要

論文の詳細を見る
Quartz crystal devices have become an essential factor in electronic equipment such as mobile communication equipment or PC. As prices of electronic equipment have lowered, the cost-down of quartz crystal devices has been strongly demanded. To achieve the cost-down of quartz crystal device manufacturing, which uses a complex manufacturing process, the yield of the quartz crystal blank lapping process, which is the preliminary process of the quartz crystal device manufacturing process, must be increased. By introducing the network analyzer to the quartz crystal blank lapping process, we have obtained real time lapping characteristics. By obtaining the new process characteristics in real-time and visualizing them when changing lapping conditions, the network analyzer can now optimize the conditions of the process. In addition, the network analyzer can now measure the optical quartz crystal blank polishing process, which was difficult to measure by using a conventional controller.
社団法人電気学会の論文
2004-04-01