ガス濃度分光分析のための広帯域可変波長ファブリ・ペローフィルター

概要

論文の詳細を見る
An electrostatically driven tunable Fabry-Perot filter with wide wavelength range from 2.5 µm to 4.5 µm has been developed by silicon-CMOS-compatible and MEMS fabrication process. For the movable mirror, we adopted a three-layer membrane which consists of polycrystalline silicon, silicon nitride and polycrystalline silicon. To optimize the mechanical characteristics of the membrane, such that the membrane stress and the driving voltage, as well as to optimize the optical characteristics, the thickness of the membrane and annealing temperatures are designed such that the top and bottom layers have opposite stress to the middle layer. This paper describes the optical and mechanical designs, fabrication process and results of evaluating the fabricated devices.
社団法人電気学会の論文
2003-10-01