Minute Current Detection during Anodic Oxidation by Atomic Force Microscope At High Humidity
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概要
- 論文の詳細を見る
The faradaic current during anodic oxidation has been detected using an atomic force microscope with intent to study the meniscus formation process and the oxidation mechanism. The faradaic current is of the order of pA for a Si sample, which is at the same level as the leakage current noise; there are problems in detecting, such as sensitivity limits and poor reproducibility. These problems occurred due to high humidity. We could overcome these problems by hermetically sealing the entire electronic parts in the unit to avoid the humidity effects and achieved the detection of a minute current of the sub-pA order even at high humidity.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-09-15
著者
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KURAMOCHI Hiromi
Nanotechnology Research Institute-National Institute of Advanced Industrial Science and Technology
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Kuramochi Hiromi
Research Consortium For Synthetic Nano-function Materials Project (synaf) National Institute Of Adva
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Yokoyama H
Mitsuba Corp. Gunma Jpn
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Ando K
Research Consortium For Synthetic Nano-function Materials Project (synaf) National Institute Of Adva
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Ando Kazunori
Research Consortium for Synthetic Nano-Function Materials Project (SYNAF), National Institute of Adv
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Yokoyama Hiroshi
Research Consortium for Synthetic Nano-Function Materials Project (SYNAF), National Institute of Adv
関連論文
- Magnetic Domain Structure of MaAs Thin Films as a Function of Temperature
- Minute Current Detection during Anodic Oxidation by Atomic Force Microscope At High Humidity
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- Reduced Humidity Effects on Probe Nano-Oxidation Investigated Using Dynamic Force Microscope