A combined objective lens-energy analyser for electron beam testing of IC
スポンサーリンク
概要
- 論文の詳細を見る
- Published for the Japanese Society of Electron Microscopy by Oxford University Pressの論文
- 1998-02-01
著者
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Liu X.-D.
Electronic and Information Engineering School, Xi'an Jiaotong University
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Tang T.-T.
Electronic and Information Engineering School, Xi'an Jiaotong University
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Wang Y.
Electronic and Information Engineering School, Xi'an Jiaotong University
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Tang T.-T.
Electronic and Information Engineering School, Xi'an Jiaotong University