Influence of Desorption of Gases from the Anode on the Reading of Pressure Determined by Field Emission Microscopy

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概要

• 論文の詳細を見る

• Outgassing rate upon electron impact from the phosphor screen of a field emission microscope has been measured as a function of anode current and applied voltage. The outgassing rate increased quickly with anode voltage up to about 1.5 kV; after that it increased only slightly. At the practical anode voltage used in field emission experiments, the outgassing rate substantially depended on only emission current and was found to be 3×10<SUP>-1</SUP> <I>I</I><SUB>e</SUB> (Pa·m<SUP>3</SUP>/s·m<SUP>2</SUP>). From this relationship, we conclude that if we use a In A or lower emission current there are few effects on the reading of pressure with a field emission vacuum gauge in UHV, and in XHV as well.

• 日本真空協会の論文
• 1994-09-20

著者

• Iwata T

  Shionogi & Co. Ltd. Osaka Jpn

• IWATA Tatsuo

  Department of Electronic and Information Technology, School of Engineering, Hokkaido Tokai Universit

• CHANG Kap-soon

  Department of Electronics, Faculty of Engineering, Tokai University

• Chang Kap-soon

  Department Of Electronics Faculty Of Engineering Tokai University

関連論文

• Influence of Desorption of Gases from the Anode on the Reading of Pressure Determined by Field Emission Microscopy
• Morphological Changes in the Rhenium Field-Emission Cathode Heated under High Electric Field
• Temperature Dependence of Field-Emission Characteristics from a p-Type Si Single Emitter with Real Surface

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