Mini-Axial-Emission Ionization Gauge with a Ring Anode
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概要
- 論文の詳細を見る
On the basis of the axial-emission ionization gauge (AEG) and the oscillator mini-ion gauge (OMG), a mini-axial-emission ionization gauge (MAEG) with a needle collector and a small ring anode has been developed. Due to the confinement of the electrostatic saddle field around the anode ring, its sensitivity is high (3.9 Pa<SUP>-1</SUP>) and the X-ray limit is low the lower limiting pressure is about 1.2×10<SUP>-10</SUP> Pa at I<SUB>e</SUB>=100μA, V<SUB>a</SUB>=1000V, V<SUB>k</SUB>=50V, V<SUB>s1</SUB>=V<SUB>s2</SUB>=0 and V<SUB>c</SUB>=0.<BR>Its small size and simple electrode construction than AEG makes degassing unnecessary, and its filament works at a lower temperature. All these make the MAEG more suitable for UHV measurement and even for XHV measurement. Furthermore, the upper limit of the MAEG can be extended to 6.7×10<SUP>-2</SUP> Pa when I<SUB>e</SUB> is decreased to 10μA and V<SUB>s1</SUB>=50V.
- 日本真空協会の論文
- 1994-09-20
著者
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Suen Sun
Shanghai Electric Tool Institute Shanghai Jiao Tong University
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ZHENG Y.
Shanghai Electric Tool Institute, Shanghai Jiao Tong University
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XU B.
Shanghai Electric Tool Institute, Shanghai Jiao Tong University
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Zheng Y.
Shanghai Electric Tool Institute Shanghai Jiao Tong University
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Suen C.D.
Shanghai Electric Tool Institute, Shanghai Jiao Tong University
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Zheng Y.D.
Shanghai Electric Tool Institute, Shanghai Jiao Tong University
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Xu B.D.
Shanghai Electric Tool Institute, Shanghai Jiao Tong University