アークイオンプレーティング法によって形成した窒化物膜の高度と密着力

概要

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The correlation between scratch adhesion and hardness has been investigated for nitride coatings deposited on metal substrates with various levels of hardness using arc ion plating. The intrinsic film hardness of TiN, CrN and (Ti0.45 Al0.55) N was separated from the composite hardness measured by micro Vickers tests using a model proposed by Ichimura et al. The critical load in the scratch test increases proportionally to the product of the scratch depth δcr and the composite hardness Hcr at the critical load. δcr for the same coating on non-nitriding substrates is almost constant. In addition to this result, δcr for coatings on nitrided steels was larger than that of coatings on substrates without nitriding. Both results suggest that δcr is an important parameter influenced by the intrinsic properties of deposited film and the true adhesion strength between the film and substrate.
社団法人表面技術協会の論文
2001-01-01