SMALL&HIGH-SENSITIVE THREE AXIS SOI CAPACITIVE ACCELEROMETER

スポンサーリンク

概要

• 論文の詳細を見る

• The three axis SOI capacitive accelerometer has been developed using silicon bulk micro- machining. The accelerometer has a glass-silicoll structure measuring 2.8mm by 2.8mm by 1.0mm. The accelerometer has a 500μm thick silicon mass formed by dicing using a SOI substrate. The accelerometer structure was released by R.I.E. process so that the sensor did not break or stick to the substrate. This process promises high throughput and high yield. The accelerometer was assembled with a switched-capasitor circuit and the characteristics were evaluated. The typical characteristics are as follows; Acceleration range is ±1.2G, sensitivity is 0.6V/G, cross-axis sensitivity is less than 7%.

• 社団法人 電気学会の論文
• 2001-07-01

著者

• ISHIDA Makoto

  Toyohashi University of Technology

• Matsumoto Yoshinori

  Keio University

• Nishimura Masaki

  Yazaki Corporation

• YAMAGUCHI Yasumasa

  YAZAKI Corporation

• KATSUMATA Fumiharu

  YAZAKI Corporation

• NISHIDA Fumihiko

  YAZAKI Corporation

関連論文

• Technology and Applications of LSI-Integrated Microsensors
• An Improved Image Reconstruction Method for a Chopperless Pyroelectric Infrared Image Sensor
• Development of an integrated inductor for impedance matching on the fully integrated silicon smart microsensors (Electron devices: 第15回先端半導体デバイスの基礎と応用に関するアジア・太平洋ワークショップ(AWAD2007))
• Development of an integrated inductor for impedance matching on the fully integrated silicon smart microsensors (Silicon devices and materials: 第15回先端半導体デバイスの基礎と応用に関するアジア・太平洋ワークショップ(AWAD2007))
• Characteristics of High-Resolution Hemoglobin Measurement Microchip Integrated with Signal Processing Circuit
• Electrical characteristics of crystalline HfO_2 high-κ dielectric films deposited on crystalline γ-Al_2O_3 films
• Development and evaluation of capacitance detection ASIC for three-axis common electrode type capacitive accelerometer
• Analysis of Thermal Drift of A Constant Temperature Control Type Three-Axis Accelerometer for High Temperatures
• SMALL&HIGH-SENSITIVE THREE AXIS SOI CAPACITIVE ACCELEROMETER
• Fabrication of Microfluidic Channel Type Smart Electrochemical DNA Sensors with Operational Amplifiers
• Characteristics of High-Resolution Hemoglobin Measurement Microchip Integrated with Signal Processing Circuit
• Performance Improvement of Molecular Beam Epitaxy Grown InSb Photodiodes for Room Temperature Operation

もっと見る 閉じる

スポンサーリンク