A Novel Graphical Analysis Method for Double Crystal X-Ray Diffraction Measurements of Strained Layer Superlattices Grown on (100) Substrate
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概要
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A novel graphical plot analysis method for double crystal X-ray diffraction measurements is applicable to cubic crystal epilayers grown on (100) substrate. In this method, we introduce a new term: the `difference of the virtual lattice constant, ΔA'. The ΔA values can be obtained by converting the angular difference between the relevant peak and a reference peak. By plotting ΔA values as a function of (k2+l2)/h2, parallel and perpendicular lattice constants can be easily analyzed for any sample with arbitrary relaxation rate. This advantage also reduces estimation error. This novel method and its advantages are experimentally demonstrated using InAsP/InGaAsP SLS samples.
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-08-15
著者
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Nakashima Kiichi
Ntt Optoelectronics Laboratories
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SUGIURA Hideo
NTT Opto-electronics Laboratories
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Sugiura Hideo
Ntt Optoelectronics Laboratories
関連論文
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- Reversal of Zeeman Splitting in InGaAs/InP Quantum Wires in High Magnetic Field
- A Novel Graphical Analysis Method for Double Crystal X-Ray Diffraction Measurements of Strained Layer Superlattices Grown on (100) Substrate
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