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Department of Dielectric and CMP, Advanced Module Technology Division, Taiwan Semiconductor Manufacturing Company, Science-Based Industrial Park, Hsinchu 300, Taiwan | 論文著者
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Wu Zhen-Cheng
Department of Dielectric and CMP, Advanced Module Technology Division, Taiwan Semiconductor Manufacturing Company, Science-Based Industrial Park, Hsinchu 300, Taiwan
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Li Lain-Jong
Department of Dielectric and CMP, Advanced Module Technology Division, Taiwan Semiconductor Manufacturing Company, Science-Based Industrial Park, Hsinchu 300, Taiwan
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Liang Mong-Song
Department of Dielectric and CMP, Advanced Module Technology Division, Taiwan Semiconductor Manufacturing Company, Science-Based Industrial Park, Hsinchu 300, Taiwan
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Jang Syun-Ming
Department of Dielectric and CMP, Advanced Module Technology Division, Taiwan Semiconductor Manufacturing Company, Science-Based Industrial Park, Hsinchu 300, Taiwan