スポンサーリンク
ULVAC Japan Ltd. | 論文
- Preparation of SrBi_2Ta_Nb_O_9 Ferroelectric Thin Films by RF Sputtering on Large Substrate
- Morphological Investigation of Cracks in TiN and Ti Films Coated on Stainless Steel Coils Caused by Bulge-Press Forming
- A Dry Process for Stripping As^+ Ion-Implanted Photoresist
- Measurements of Parameters of Two-Electron-Temperature Plasma Produced by Electron Cyclotron Resonance
- Realistic Etch Yield of Fluorocarbon Ions in SiO2 Etch Process
- Observation of Characteristics of Magnetic Neutral Loop Discharge Plasma Appearing at Antenna in RF Circuit