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Nagano Denshi | 論文
- Fabrication and Bonding Strength of Bonded Silicon-Quartz Wafers
- Surface Impurities Encapsulated by Silicon Wafer Bonding
- Silicon Wafer Bonding Mechanism for Silicon-on-Insulator Structures
- Dislocation-Free Silicon on Sapphire by Wafer Bonding
- Thinned Silicon Layers on Oxide Film, Quartz and Sapphire by Wafer Bonding (Special Issue on Quarter Micron Si Device and Process Technologies)