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Microelectronics Research Center, SANYO Electric Co., Ltd | 論文
- Influence of Hydrogen in a-Si on Recrystallization of Low-Temperature Processed Poly-Si Film by Excimer Laser Annealing
- Study of Crystal Growth Mechanism for Poly-Si Film Prepared by Excimer Laser Annealing
- Characterization of Poly-Silicon Film Prepared by Excimer Laser Annealing