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Dept. of Electronic Engineering, University of Tokyo | 論文
- LSI Design Flow for Shot Reduction of Character Projection Electron Beam Direct Writing Using Combined Cell Stencil(Physical Design,VLSI Design and CAD Algorithms)
- Impurity-Free Disordering of InGaAs/InGaAlAs/InP Quantum Wells by Dielectric Thin Cap Films and Its In-Plane Spatial Resolution