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Department of Electrical and Computer Engineering and Rice Quantum Institute, Rice University | 論文
- Enhanced Microlithography Using Combined Phase Shifting and Off-axis Illumination
- Submicron Optical Lithography Based on a New Interferometric Phase Shifting Technique
- Performance Characteristics of on Electron Beam Pumped XeF(C→A) Laser with Positive Branch Injection-Controlled Unstable Resonators