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Department Of Physics And Advanced Materials Science/center For Next Generation Semiconductor Techno | 論文
- High-Beam-Current Microcolumns with Large Apertures
- Effect of the Einzel Lens Structure in Microcolumn
- A Miniaturized Electron Beam Column Simulation by the Fast Moving Least Square Reproducing Kernel Point Collocation Method
- High-Beam-Current Microcolumns with Large Apertures
- Effect of the Einzel Lens Structure in Microcolumn