Matsuda Naoki | Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Kyoto 606-8501, Japan
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- Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Kyoto 606-8501, Japanの論文著者
Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Kyoto 606-8501, Japan | 論文
- Three-Dimensional Atomic-Scale Cellular Model and Feature Profile Evolution during Si Etching in Chlorine-Based Plasmas: Analysis of Profile Anomalies and Surface Roughness
- Modeling and Simulation of Nanoscale Surface Rippling during Plasma Etching of Si under Oblique Ion Incidence
- Particle Simulations of Sheath Dynamics in Low-Pressure Capacitively Coupled Argon Plasma Discharges
- Numerical and Experimental Evaluation of Ultrasonic Wave Propagation Characteristics at Contact Interface
- Analytical Aspects of Cumulative Superposition Procedure for Elastic Indentation Problems