Itoh Toshihiro | Research Center of Ubiquitous MEMS and Micro Engineering, National Institute of Industrial Science and Technology (AIST)

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• Research Center of Ubiquitous MEMS and Micro Engineering, National Institute of Industrial Science and Technology (AIST)の論文著者

Research Center of Ubiquitous MEMS and Micro Engineering, National Institute of Industrial Science and Technology (AIST) | 論文

• Fabrication and Characterization of Ferroelectric PZT and BaTiO3 Thin Films on Releasable Electrode Structures

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