Oh Kyoung-Suk | Department of Physics, Cheju National University
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概要
Department of Physics, Cheju National University | 論文
- A Formation and Characteristics of the Fluorinated Amorphous Carbon Films with Low Dielectric Constant by HDPCVD
- A Formation and Characteristics of the Fluorinated Amorphous Carbon Films with Low Dielectric Constant by HDPCVD