Nakashima Hiroshi | Advanced Science and Technology Center for Cooperative Research, Kyushu University, Kasuga Fukuoka 816-8580, Japan

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• Advanced Science and Technology Center for Cooperative Research, Kyushu University, Kasuga Fukuoka 816-8580, Japanの論文著者

Advanced Science and Technology Center for Cooperative Research, Kyushu University, Kasuga Fukuoka 816-8580, Japan | 論文

• Growth Kinetics and Electrical Properties of Ultrathin Si Oxide Film Fabricated Using Krypton-Diluted Oxygen Plasma Excited by Electron Cyclotron Resonance

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