Lee Hyunseop | Department of Precision and Mechanical Engineering, Pusan National University, Jangjeon-dong, Geumjeong-gu, Busan 609-735, Korea

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• Department of Precision and Mechanical Engineering, Pusan National University, Jangjeon-dong, Geumjeong-gu, Busan 609-735, Koreaの論文著者

Department of Precision and Mechanical Engineering, Pusan National University, Jangjeon-dong, Geumjeong-gu, Busan 609-735, Korea | 論文

• Effect of Process Parameters on Friction Force and Material Removal in Oxide Chemical Mechanical Polishing

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