TUNG Chih | Institute of Microelectronics, Department of Failure Analysis and Reliability

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• 同名の論文著者
• Institute of Microelectronics, Department of Failure Analysis and Reliabilityの論文著者

Institute of Microelectronics, Department of Failure Analysis and Reliability | 論文

• The Superiority of N_2O Plasma Annealing over O_2 Plasma Annealing for Amorphous Tantalum Pentoxide (Ta_2O_5) Films

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