Tanaka Akihiro | Research Center for Advanced Carbon Materials, AIST Tsukuba Central 5, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan

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• 同名の論文著者
• Research Center for Advanced Carbon Materials, AIST Tsukuba Central 5, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japanの論文著者

Research Center for Advanced Carbon Materials, AIST Tsukuba Central 5, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan | 論文

• Development of Plasma Based Ion Implantation System using an Electron Cyclotron Resonance Plasma Source with a Mirror Field and Synthesis of Carbon Thin Films

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