Ohta Takeshi | Laser Research Department, Research Division, Komatsu Ltd.

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• 同名の論文著者
• Laser Research Department, Research Division, Komatsu Ltd.の論文著者

Laser Research Department, Research Division, Komatsu Ltd. | 論文

• Dynamics of Output Spectra within a Single Laser Pulse from a Line-Narrowed Excimer Laser
• Development of a 2 kHz F_2 Laser for 157 nm Lithography
• Performance Improvement of a Discharge-Pumped ArF Excimer Laser by Xenon Gas Addition

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