HIRANO Saijo | Kokusai Electric Co., Ltd.
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概要
Kokusai Electric Co., Ltd. | 論文
- Generation of Large Dislocation Loops in Silicon Crystals
- Hexagonal Platelets Observed in Nickel Diffused Silicon
- Anomalous Etch Patterns in Highly Doped Silicon
- Infrared Observation of Anomalous Patterns in Highly Doped Silicon
- Non-magnetic Plasma Source which Combines Microwaves with an Inductively Coupled Plasma