Mibu Ko | Graduate School of Engineering, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japan
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- Graduate School of Engineering, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japanの論文著者
Graduate School of Engineering, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japan | 論文
- Comparison of Properties of Atmospheric-Pressure Radio Frequency He/SF6/O2 and He/CF4/O2 Discharges
- Comparison of Plasma Parameters Measured in Inductively Coupled Ar/C4F8/O2 and Ar/CF4/O2 Plasmas
- Probe Measurements and Optical Emission Spectroscopy in Inductively Coupled Ar/CF4, Ar/NF3, and Ar/SF6 Discharges
- Analysis of Oxidation State of Multilayered Catalyst Thin Films for Carbon Nanotube Growth Using Plasma-Enhanced Chemical Vapor Deposition