Kim Hyeong-Soo | Memory R&D Division, Hyundai Electronics Industries Co., Ltd.
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概要
Memory R&D Division, Hyundai Electronics Industries Co., Ltd. | 論文
- Novel Organic Bottom Antireflective Coating Materials for 193nm Lithography
- Environmentally stable chemically amplified positive resist containing vinyllactam terpolymers
- Environmentally stable chemically amplified positive resist containing vinyllactam terpolymers