Uchino Kiichiro | Plasma Engineering Laboratory, Department of Applied Science for Electronics and Materials Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan

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• Plasma Engineering Laboratory, Department of Applied Science for Electronics and Materials Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japanの論文著者

Plasma Engineering Laboratory, Department of Applied Science for Electronics and Materials Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan | 論文

• Measurements of Electron Energy Distribution Functions in Pulse-Modulated Ar and Ar/O2 Inductively Coupled Plasmas using Laser Thomson Scattering

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