Baik Ki-Ho | Memory R&D Division, Hyundai Electronics Industries Co., Ltd.
スポンサーリンク
概要
Memory R&D Division, Hyundai Electronics Industries Co., Ltd. | 論文
- Novel Organic Bottom Antireflective Coating Materials for 193nm Lithography
- Environmentally stable chemically amplified positive resist containing vinyllactam terpolymers
- Environmentally stable chemically amplified positive resist containing vinyllactam terpolymers