Samukawa Seiji | LSI Basic Research Laboratory, Silicon Systems Research Laboratories, NEC Corporation

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• 同名の論文著者
• LSI Basic Research Laboratory, Silicon Systems Research Laboratories, NEC Corporationの論文著者

LSI Basic Research Laboratory, Silicon Systems Research Laboratories, NEC Corporation | 論文

• Design, Process, and Evaluation of a Tunable Optical Fabry-Perrot Filter Using a Silicon Capacitive Pressure Sensor(Special Issue on Current Electromechanical Devices and Their Materials with Recent Innovations)

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