ITOGA Takashi | System LCD Group Process Development Laboratories, SHARP Corporation

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• ITOGA Takashiの詳細を見る
• 同名の論文著者
• System LCD Group Process Development Laboratories, SHARP Corporationの論文著者

System LCD Group Process Development Laboratories, SHARP Corporation | 論文

• Low-Temperature Gate Insulator for Poly-Si Thin Film Transistors by Combination of Photo-Oxidation and Plasma Enhanced Chemical Vapor Deposition Using Tetraethylorthosilicate and O_2 Gases(Special Issue on Electronic Displays)

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