Chung Chee | Department of Chemical Engineering and Institute of Clean Technology, Inha University, 253 Yonghyun-Dong, Nam-Gu, Incheon 402-751, Korea

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Department of Chemical Engineering and Institute of Clean Technology, Inha University, 253 Yonghyun-Dong, Nam-Gu, Incheon 402-751, Korea | 論文

• Effect of Etch Gas on Dry Etching of Ferroelectric Bi3.25La0.75Ti3O12 Thin Films

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