Park Young | Semiconductor R&D Center, Samsung Electronics Co., Ltd., San #24, Nongseo-Lee, Ki heung-Eup, Yongin City, Kyungki-Do 449-900, Korea
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- Semiconductor R&D Center, Samsung Electronics Co., Ltd., San #24, Nongseo-Lee, Ki heung-Eup, Yongin City, Kyungki-Do 449-900, Koreaの論文著者
Semiconductor R&D Center, Samsung Electronics Co., Ltd., San #24, Nongseo-Lee, Ki heung-Eup, Yongin City, Kyungki-Do 449-900, Korea | 論文
- Atomic Layer Deposition- and Chemical Vapor Deposition-TiN Top Electrode Optimization for the Reliability of Ta2O5 and Al2O3 Metal Insulator Silicon Capacitor for 0.13 $\mu$m Technology and Beyond
- Enhancement of Mask Selectivity in SiO_2 Etching with a Phase-Controlled Pulsed Inductively Coupled Plasma