Tsuchiya Toshiyuki | Department of Micro Engineering, Graduate School of Engineering, Kyoto University, Kyoto 606-8501, Japan

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Department of Micro Engineering, Graduate School of Engineering, Kyoto University, Kyoto 606-8501, Japan | 論文

• Fatigue Testing of Polycrystalline Silicon Thin-Film Membrane Using Out-of-Plane Bending Vibration

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