Nam So-Young | GIGA Process Team, LG Semicon Co., Ltd.
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概要
GIGA Process Team, LG Semicon Co., Ltd. | 論文
- The study on the sidewall films formed during Si trench etching in Cl_2/HBr based plasmas
- The study on the sidewall films formed during Si trench etching in Cl_2/HBr based plasmas
- The study on the sidewall films formed during Si trench etching in Cl_2/HBr based plasmas
- V-band CPW Medium Power Amplifier for 60 GHz Wireless LAN application(Session A2 Compound Semiconductor Devices I)(2004 Asia-Pacific Workshop on Fundamentals and Application of Advanced Semiconductor Devices (AWAD 2004))
- V-band CPW Medium Power Amplifier for 60 GHz Wireless LAN application(Session A2 Compound Semiconductor Devices I)(2004 Asia-Pacific Workshop on Fundamentals and Application of Advanced Semiconductor Devices (AWAD 2004))