Matsubara Hideaki | Development Department, Dainippon Screen Manufacturing Co., Ltd.
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概要
Development Department, Dainippon Screen Manufacturing Co., Ltd. | 論文
- Noncontact Measurement of Sodium Ions in Silicon Oxide
- Noncontact Measurement of Doping Profile for Bare Silicon
- Improvement of Sensor for Noncontact Capacitance/Voltage Measurement and Lifetime Measurement of Bare Silicon(100)
- Noncontact Measurement of Generation Lifetime
- Evaluation of GaAs Wafer Using Nomcontact Capacitance/Voltage Measurement