Kim Yong-Kweon | Lab for Micro Sensors and Actuators, School of Electrical Engineering, Seoul National University

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• 同名の論文著者
• Lab for Micro Sensors and Actuators, School of Electrical Engineering, Seoul National Universityの論文著者

Lab for Micro Sensors and Actuators, School of Electrical Engineering, Seoul National University | 論文

• Novel Fabrication of Comb Actuator Using Reactive Ion Etching of Polysilicon and (110) Si Anisotropic Bulk Etching in KOH

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