Hane Kazuhiro | Department of Nanomechanics, Graduate School of Engineering, Tohoku University, 6-6-01 Aza Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan

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• Department of Nanomechanics, Graduate School of Engineering, Tohoku University, 6-6-01 Aza Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japanの論文著者

Department of Nanomechanics, Graduate School of Engineering, Tohoku University, 6-6-01 Aza Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan | 論文

• Angled Exposure Method for Pattering on Three-Dimensional Structures

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