Chang Liann-Be | Department of Electrical Engineering, Chung-Cheng Institute of Technology, National Defense University, Tashi, Taoyuan, Taiwan, R.O.C.

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• Department of Electrical Engineering, Chung-Cheng Institute of Technology, National Defense University, Tashi, Taoyuan, Taiwan, R.O.C.の論文著者

Department of Electrical Engineering, Chung-Cheng Institute of Technology, National Defense University, Tashi, Taoyuan, Taiwan, R.O.C. | 論文

• Etching Selectivity and Surface Profile of GaN in the Ni, SiO2 and Photoresist Masks Using an Inductively Coupled Plasma

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