Chang Chia-hua | Graduate Institute Of Electronics Engineering / Department Of Electrical Engineering National Taiwan

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Graduate Institute Of Electronics Engineering / Department Of Electrical Engineering National Taiwan | 論文

• Low Temperature Ultra-thin Hafnium Oxide Dielectrics by Sputtering of Hf Metal on Tilted Substrate Followed by Nitric Acid Oxidation then Anodization Compensation in D. I. Water

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