Koh Meishoku | Research Center For Nanodevices And Systems Hiroshima University:crest Japan Science And Technology

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Research Center For Nanodevices And Systems Hiroshima University:crest Japan Science And Technology | 論文

• Quantitative Evaluation of Dopant Loss in 5-10 keV As Ion Implantation for Low-Resistive, Ultrashallow Source/Drain Formation

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